FIELD: methods of application of protective, decorative and wear-resistant coatings. SUBSTANCE: essence of this method of applying protective, decorative and wear-resistant coatings resides in creating at least one additional flow of matter, which includes electrons and neutral and ionized particles of materials of target, metallic cathode and active gas by bombarding at least one target having negative potential relative to plasma by positive plasma ions and exposing product surface by generated flows. Disclosed method prescribes maintaining target potential relative to plasma within range of -100 V to -5 kV and bombarding target by positive ions with regulating target temperature from room one to 900 C. EFFECT: disclosed method allows producing high-quality coatings, particularly on surfaces of dielectric materials at low temperatures down to room ones and maintaining high rates of application of coatings.
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Authors
Dates
1994-11-30—Published
1992-01-10—Filed