APPARATUS FOR SYNTHESIS OF NANOSTRUCTURED COATINGS Russian patent published in 2016 - IPC H01J27/00 

FIELD: technological processes.

SUBSTANCE: invention relates to synthesis of wear-resistant nanocomposite coatings on items in vacuum chamber. Apparatus for synthesis of coatings containing working vacuum chamber, connected to anode chamber, hollow cathode emission grid overlapping hollow cathode target installed at bottom of hollow cathode opposite emission grid, a power supply discharge, positive pole connected with chamber and anode, and negative pole-with hollow cathode and target, and high-voltage pulse generator, positive pole connected with chamber and anode, and negative pole with emission grid additionally contains second screen and hollow electrode enclosing space between screens and electrically connected therewith, besides, device additionally comprises magnetic system with arched configuration of power lines, installed after target at bottom of hollow cathode.

EFFECT: broader technological capabilities due to synthesis of both conducting and dielectric nanostructured coatings at simultaneous improvement of quality of coatings due to higher adhesion, wear resistance and crack resistance.

2 cl, 1 dwg