DEVICE FOR SYNTHESIS AND DEPOSITION OF METAL COATINGS ON CURRENT-CONDUCTING ARTICLES Russian patent published in 2018 - IPC H01J37/34 C23C14/35 

FIELD: machine building.

SUBSTANCE: invention relates to mechanical engineering, in particular to devices for synthesis and deposition of metallic coatings on conductive articles in a vacuum chamber. Device for synthesis and deposition of metal coatings on conductive articles comprises a working chamber with a vacuum pumping channel, flat targets of planar magnetrons on the walls of the chamber, power supplies of magnetron discharges connected by negative poles with targets, and positive poles with the chamber. Device additionally comprises an electrode isolated from the chamber and an electrode mounted inside it, a direct current source, connected by the positive pole to the electrode, and by the negative pole to the chamber, and a grid that overlaps the vacuum pumping channel, connected electrically to the chamber.

EFFECT: improving the quality of the synthesized coating.

1 cl, 1 dwg