LOW PRESSURE ARC PLASMA IMMERSION COATING VAPOUR DEPOSITION AND ION TREATMENT Russian patent published in 2018 - IPC C23C14/24 C23C14/35 C23C14/54 H01J37/32 H05H1/00 

FIELD: electricity.

SUBSTANCE: system includes a vacuum chamber and a coating assembly. Coating assembly includes a vapour source, a substrate holder, a remote anode electrically coupled to the cathode target, and a cathode chamber assembly. Cathode chamber assembly includes a cathode target, a primary anode and a shield which isolates the cathode target from the vacuum chamber. Shield defines an opening for transmitting an electron emission current of a remote arc discharge from the cathode target to the remote anode that streams along the target face long dimension. Primary power supply is connected between the cathode target and the primary anode while a secondary power supply is connected between the cathode target and the remote anode. Linear remote anode dimension and a vapour source short dimension are parallel to a dimension in which an arc spot is steered along the cathode target.

EFFECT: invention relates to a coating system and method.

20 cl, 51 dwg, 1 tbl