DEVICE FOR SYNTHESIS OF COATINGS Russian patent published in 2014 - IPC H01J37/04 B82B3/00 

FIELD: chemistry.

SUBSTANCE: device for synthesis of composite coatings contains a working vacuum chamber 1, an emission net 2 from a precipitated metal, a hollow cathode 3, limited by the emission net 2, an anode 4 inside the hollow cathode 3, a source 5 of an electric discharge supply, with a positive pole connected to the anode 4, and with a negative pole connected to the hollow cathode 4, a target 6, installed on the bottom of the hollow cathode 3 opposite to the emission net 2, a source 7 of high voltage, with a positive pole connected to the hollow cathode 3, and with a negative pole connected to the target 6, a source 8 of net voltage, with a positive pole connected to the anode 4 and with a negative pole connected via a high voltage diode 9 to the emission net 2, and a generator 10 of high voltage impulses, with a positive pole connected to the anode 4 and with a negative pole connected to the emission net 2.

EFFECT: creation of a device for synthesis of both conductive and dielectric coatings on products from conductive and dielectric materials, which would ensure the reduction to zero of current of accelerated ions on the surface of the product and impulse-periodical bombing of a synthesised on it coating by molecules of gas with energy of tens of keV.

1 dwg