FIELD: electrical engineering; devices for aoolication of thin dielectric films. SUBSTANCE: magnetic system includes main channel-shaped permanent magnets positioned relative each other so that like poles face one another and auxiliary channel-shaped permanent magnets disposed inside channels and also positioned relative one another so that their like poles face each other. Magnetic fields of main and auxiliary permanent magnets intersect at angle of 90 deg. EFFECT: more sophisticated design. 2 dwg
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| PLASMA METHOD OF PRODUCING FILMS | 1992 |
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SU1832134A1 |
