CATHODE JOINT FOR IONIC-PLASMA APPLICATION OF THIN FILMS IN VACUUM Russian patent published in 1997 - IPC

FIELD: thin films application by material ionic spraying in vacuum. SUBSTANCE: aim is to create magnetic system, magnetic field intensity and induction of which in area between poles is changing in time and space. Aim is realized due to the fact, that magnetic system is made in the form of main electric magnets with closed cores of channel form mounted one in respect another with similar poles. Inside main electrical magnets there are additional electrical magnets also with closed cores of channel form and also mounted one in respect to another with similar poles. Magnetic fields of main and additional magnets are crossing at angle of 90 deg and their amount is no less than by two of each type. EFFECT: created magnetic system, magnetic field intensity and induction of which in interpoles area is changing in time and space. 2 dwg