PROCESS OF MANUFACTURE OF PLANAR P-N JUNCTIONS ON INDIUM ANTIMONIDE Russian patent published in 1995 - IPC

Abstract RU 2026589 C1

FIELD: microelectronics. SUBSTANCE: in process of manufacture of planar p-n junctions based on indium antimonide first surface of starting plate of indium antimonide is prepared, masking silicon film is deposited by synthesis from gaseous phase, windows for local injection of impurity atoms are open in it. Then diffusion is conducted, masking film is removed and surface layer is etched off of plate. EFFECT: facilitated manufacture. 1 tbl

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RU 2 026 589 C1

Authors

Astakhov V.P.

Bojkov Ju.I.

Dudkin V.F.

Mozzhorin Ju.D.

Nijazova A.R.

Rjabova A.A.

Sidorova G.Ju.

Dates

1995-01-09Published

1991-07-08Filed