FIELD: microelectronics. SUBSTANCE: in process of manufacture of planar p-n junctions based on indium antimonide first surface of starting plate of indium antimonide is prepared, masking silicon film is deposited by synthesis from gaseous phase, windows for local injection of impurity atoms are open in it. Then diffusion is conducted, masking film is removed and surface layer is etched off of plate. EFFECT: facilitated manufacture. 1 tbl
Title | Year | Author | Number |
---|---|---|---|
PROCESS OF MANUFACTURE OF PLANAR P - N JUNCTIONS ON INAS CRYSTALS OF N-TYPE CONDUCTIVITY | 1993 |
|
RU2045107C1 |
METHOD OF MANUFACTURING MICROCIRCUITS | 1982 |
|
SU1085439A1 |
PROCESS OF MANUFACTURE OF MULTILAYER SILICON STRUCTURES | 1991 |
|
SU1814430A1 |
PLANAR PHOTODIODE ON INDIUM ANTIMONIDE | 2011 |
|
RU2461914C1 |
COMPLEMENTARY BIPOLAR TRANSISTOR STRUCTURE OF INTEGRATED CIRCUIT | 1997 |
|
RU2111578C1 |
METHOD FOR PRODUCING PHOTODIODES ON INDIUM ANTIMONIDE | 2006 |
|
RU2313853C1 |
METHOD OF MANUFACTURING A MULTI-FILM SILICON PIN-PHOTOSENSITIVE ELEMENT | 2017 |
|
RU2654998C1 |
METHOD FOR MANUFACTURING P-N-JUNCTIONS ON CRYSTALS OF INDIUM ANTIMONIDE HAVING N-TYPE CONDUCTANCE | 1993 |
|
RU2056671C1 |
PHOSPHORUS DIFFUSION PROCESS FROM SOLID SOURCE WHEN MANUFACTURING SEMICONDUCTOR DEVICES | 1991 |
|
SU1829758A1 |
METHOD OF MANUFACTURING SEMICONDUCTING DEVICES WITH NEAR-WALL <P-N>-TRANSITIONS | 1983 |
|
SU1178269A1 |
Authors
Dates
1995-01-09—Published
1991-07-08—Filed