THIN-FILM PRESSURE PICKUP Russian patent published in 1997 - IPC

FIELD: measurement technology; measurement of pressure when tensoresistor pickup is subjected to effect of abrupt change in temperature of medium being measured. SUBSTANCE: pressure pickup has body 1, and membrane 2 with dielectric layer 3. Its surface of the side of dielectric has microrelief with convex elements. pressure pickup has also tensoresistors 4. Surface of dielectric layer 3 on the side of dielectric and tensoresistors 4 has convex elements. Configuration and orientation of the latter are identical with surface elements of membrane 2 on the side of dielectric. Height of surface elements of membrane 2 is equal to 0.01-01 of thickness of dielectric layer 3. EFFECT: high efficiency of measurements. 2 cl, 6 dwg