METHOD FOR PRODUCING SINGLE-CRYSTALLINE ZINC OXIDE LAYERS ON NON-ORIENTED SUBSTRATES Russian patent published in 1999 - IPC

FIELD: electronic engineering. SUBSTANCE: single- crystalline zinc oxide (ZnO) layers are formed on non-oriented substrates made of glass, ceramics, molten quartz, high-melting metal, or semiconductor whose permanent lattices are other than those of zinc oxide by using chemical transport reactions in low-pressure flow reactor in hydrogen environment. In order to ensure autoepitaxy, non-oriented substrate surface is covered in advance with optimized intermediate layer of zinc oxide, thick, which is, essentially, base-oriented texture independent of orienting properties of substrate using magnetron spraying method for the purpose. EFFECT: high structural perfection and homogeneity, excellent smoothness of epitaxial layer surfaces. 1 dwg