FIELD: electronics and radio engineering. SUBSTANCE: device has a reactor with vacuum evacuation system and working chamber with HF-discharge excitation system and rotary holder. The holder is provided with a ring mounted on a shaft. Around the ring are located rod-type cup supports. Moreover, the device has channels to feed plasma into the inner surface of cups. The above shaft has central and radial channels communicating with the vacuum evacuation system. EFFECT: higher efficiency and reliability. 3 dwg
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