DEVICE FOR DEPOSITION OF THE MULTILAYERED OPTICAL COATINGS Russian patent published in 2007 - IPC C23C14/46 C23C14/56 C23C14/54 

FIELD: electronic industry; glass industry; other industries; devices for production of the multilayered optical coatings.

SUBSTANCE: the invention is pertaining to the device for deposition of the multilayered optical coatings and may be used at manufacture of the laser technology at development of the antireflecting coatings and the reflective coatings on the butt surfaces of the semiconductor lasers. The device contains two targets located in the vacuum chamber and two ion beam formers. In the vacuum chamber there is the multi-channel loading port (MCLP) with the substrates. The pairs including the ion beam former and the target are disposed on the opposite sides of the MCLP. The active gas stream former is made with the capability to form more than one stream and to realize feeding of the active gas particles streams to the different sides of the MCLP. The MCLP is capable to change positions of the substrates and to reorient their working surfaces concerning the pairs of the ion beam former and the target. In each indicated pair the target are executed in the form of the units amounting the unit of targets are made as the components composing the targets block with the capability of their mutual replacement or to be replaced by the designated for cleaning reflective target. The automatic control unit is electrically connected with the ion beam formers, the blocks of the targets, the active gas streams former and the MCLP. The invention is aimed at the increase of the efficiency of the production process and at improvement of reproducibility of the process of deposition of the coatings in the continuous production process.

EFFECT: the invention is aimed at the increase of the production process efficiency and improvement of reproducibility of the process of deposition of the coatings in the continuous production mode.

10 cl, 6 dwg