FIELD: chemistry.
SUBSTANCE: method of obtaining isotopically enriched silicon tetrachlorides 28SiCl4, 29SiCl4, 30SiCl4 includes interaction of isotopically enriched silicon tetrafluorides 28SiF4, 29SiF4, 30SiF4 and aluminium chloride (III) at a temperature of 250-400°C in closed reactor with 2-10-fold excess of aluminium chloride (III) relative to stoichiometric ratio and contact time of reagents is 30-60 h.
EFFECT: high output of isotopically enriched silicon tetrachloride, increase of method cost-effectiveness and process safety.
2 ex
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Authors
Dates
2017-05-03—Published
2016-01-27—Filed