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2 039 007

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C1

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IPC

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Application

93027013/26, 1993-05-27

(22)

Actual filing date

1993-05-27

(45)

Published

1995-07-09

(72)

Inventor

Kvaratskheli Ju.K.Jakshin V.V.Vilkova O.M.Skorovarov D.I.

(73)

Holder

Vserossijskij Nauchno-Issledovatel'Skij Institut Khimicheskoj Tekhnologii

METHOD OF HIGH PURE INORGANIC ACIDS STORAGE Russian patent published in 1995 - IPC

Abstract RU 2039007 C1

FIELD: inorganic chemistry. SUBSTANCE: preliminary purified absorber is added to the high pure mineral acids containing microimpurity level 10-7÷ 10-9 wt.-% in the case of their storage in polyethylene or floroplastic crate. Graphite 8-4, or ion-exchange resin КУ 2 x 8, or porolas T were used as absorbers for hydrochloric acid, and graphite 8-4, or fluoroplastic powder, or porolas T were used for nitric acid. Method ensures to exclude the terminal acid purification after storage used as etching agents in semiconductive equipment manufacture. EFFECT: improved method of storage. 4 cl, 6 tbl

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RU 2 039 007 C1

Authors

Kvaratskheli Ju.K.

Jakshin V.V.

Vilkova O.M.

Skorovarov D.I.

Dates

1995-07-09—Published

1993-05-27—Filed

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