FIELD: measurement technology. SUBSTANCE: N coherent probing signals are radiated at N frequencies and are directed to multilayer structure. N probing signals are received at angle sector which signals are reflected from multilayer medium. Signals received are transformed into temporal region and peak temporal components are selected through the temporal spectrum. Times of temporal selected peak components are measured and dielectric permeabilities and thicknesses of the layer are determined by means of the relations given in the description of the invention. Angles of reception of the signals being reflected by multilayer medium, are known. EFFECT: improved precision of measurement. 4 dwg
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