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2 046 095

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IPC

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Application

4954422/26, 1991-06-25

(22)

Actual filing date

1991-06-25

(45)

Published

1995-10-20

(72)

Inventor

Volk V.I.Zakharkin B.S.Karelin A.I.Veselov S.N.Shkljar L.I.Shpunt L.B.Beljaev A.V.Karelin V.A.

(73)

Holder

Vserossijskij Nauchno-Issledovatel'Skij Institut Neorganicheskikh Materialov Im.Akad. A.A.BochvaraNauchno-Proizvodstvennoe Ob"Edinenie Institut"

METHOD OF SILICON TRIFLUORIDE PRODUCING Russian patent published in 1995 - IPC

Abstract RU 2046095 C1

FIELD: chemical technology. SUBSTANCE: fluosilicic acid salt dissolved in organic solvent is produced by treatment of its aqueous solution with organic base solution. Prepared salt is dried by bubbling with air flow or inert gas heated up to 50-55 C and decomposed by treatment with concentrated nonvolatile mineral acids or 4 ± 1% oleum followed by separation of anhydrous gaseous silicon tetrafluoride and hydrogen fluoride. Aromatic dilutants can be used as organic base dilutants. Method is used in technology of high clean grade silicon and its compounds. EFFECT: improved method of product producing. 4 cl, 3 tbl

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RU 2 046 095 C1

Authors

Volk V.I.

Zakharkin B.S.

Karelin A.I.

Veselov S.N.

Shkljar L.I.

Shpunt L.B.

Beljaev A.V.

Karelin V.A.

Dates

1995-10-20—Published

1991-06-25—Filed