DIELECTRICS AND SEMICONDUCTORS SURFACES PROTECTING COATING PRODUCTION METHOD Russian patent published in 1995 - IPC

Abstract RU 2050205 C1

FIELD: protecting coatings application. SUBSTANCE: method provides for application on surface of 40 60 mol solution of alkoxy compound of silicon in organic solvent, that has 0.15 0.35 of oxide catalyst from volume of solution, with following solution drying and thermal treatment of coating under temperature of 300 600 C. EFFECT: increased productivity.

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RU 2 050 205 C1

Authors

Alekseev N.E.

Miljavskij Ju.S.

Dates

1995-12-20Published

1991-06-25Filed