METHOD OF PRESERVING SOLID-STATE SURFACE AND COATING PRESERVING SOLID-STATE SURFACE Russian patent published in 2016 - IPC H01L21/312 H01L21/02 

FIELD: instrument making.

SUBSTANCE: invention relates to a technology of making devices of micro- and nanoelectronics. Proposed is a method of preserving a solid-state surface, which involves successively performed stages for preliminary preparation of the surface to preservation and application of a preserving coating. First stage is performed using a non-damaging cleaning of the solid surface resulting in formation on the surface of polar groups. Second one - using carbonyldiimidazole forming the coating containing at least two monolayers formed from the said substance. Also proposed is a preserving the solid-state surface coating containing a monolayer located on the solid surface and at least one monolayer between the environment and the said monolayer. Monolayer located on the surface is rigidly connected to it, is intended for implementation of functionalization of the solid surface. Additionally made monolayer bordering with the environment is intended for protection of the solid-state surface from the environment effects and for the purpose of functionalization it is easily removed.

EFFECT: provided are prevention of damage to structural elements of the solid surface at preservation/depreservation and fast depreservation in case of sensors with simultaneous functionalization.

9 cl, 4 dwg, 7 ex