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2 064 525

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IPC

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Application

93010777/02, 1993-03-01

(22)

Actual filing date

1993-03-01

(45)

Published

1996-07-27

(72)

Inventor

Absaljamov S.K.Egorov V.V.Isakov A.S.Strelkov S.S.Khartov S.A.Shinin V.K.

(73)

Holder

Nauchno-Issledovatel'Skij Institut Prikladnoj Mekhaniki I Ehlektrodinamiki Moskovskogo Aviatsionnogo Instituta

METHOD FOR MAGNETRON APPLICATION OF THE THIN-FILM COVERAGES OF VARIOUS MATERIALS AND THEIR COMPOUNDS Russian patent published in 1996 - IPC

Abstract RU 2064525 C1

FIELD: plasma procedures, thin-film coverages. SUBSTANCE: coverages are applied by means of a newly designed magnetron using an accelerator with closed electron drift for the purification of a surface and so called ionic support when applying the coverages. EFFECT: obtained high- quality coverages on the basis of nitrides, oxides, and pure materials on articles having various shape and composition. 4 cl, 4 dwg

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RU 2 064 525 C1

Authors

Absaljamov S.K.

Egorov V.V.

Isakov A.S.

Strelkov S.S.

Khartov S.A.

Shinin V.K.

Dates

1996-07-27—Published

1993-03-01—Filed

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