METHOD FOR PRODUCING MIS STRUCTURE WITH HIGH- TEMPERATURE SUPERCONDUCTOR Russian patent published in 2000 - IPC

FIELD: superconductor engineering. SUBSTANCE: method involves passing nuclear particles onto layer of high-temperature superconductor, type 123, and monitoring structure parameters in the course of its production; superconductor material is DyBa₂Cu₃O_7-δ acted upon by ion flow at energy required for ion ingress into material through entire thickness of insulation while observing the surface all the time, and procedure is ceased as soon as metal dysprosium is detected on it. This fact can be recognized, for example, by bonding energy of basic dysprosium level. Methods for photoelectronic n-situ check of mentioned structure parameters are also proposed. Nanometric and subnanometric structures produced by mentioned methods are noted for distinct interfaces. EFFECT: improved reproducibility of structure parameters. 3 cl, 3 ex