DEVICE FOR DEPOSITION OF MULTILAYER COATS IN VACUUM Russian patent published in 1996 - IPC

FIELD: electronics. SUBSTANCE: invention relates to equipment used to deposit multilayer coats in vacuum under uninterrupted mode. Additional vacuum chamber of device is fitted with system for cleaning of substrates and loading chamber is provided with preheating system. Each sluice window shut by means of vacuum is manufactured in the form of frame with coaxial inlet and outlet holes, vacuum gate is made in the form of elements with plane-parallel planes with groove located over perimeter of its sealing surface and used to accommodate sealing. Sealing contacts internal surface of frame over perimeter of window shut by means of vacuum. Driving mechanism to seal vacuum gate is fabricated in the form of hydraulic drives with rods positioned to seal outlet hole shut by means of vacuum with the aid of lever system anchored on end of corresponding rod. Mechanisms for transportation of substrates are placed in each chamber for subsequent transfer of substrates into each chamber arranged in sequence through proper sluice windows connecting chambers shut by means of vacuum. EFFECT: expanded functional capabilities, enhanced operational efficiency. 6 cl, 1 dwg