DEVICE FOR APPLICATION OF MULTI-LAYERED COATINGS ONTO PRODUCTS Russian patent published in 2013 - IPC C23C14/35 

FIELD: metallurgy.

SUBSTANCE: device includes a cylindrical working chamber with a magnetron spraying system, a power supply system of the magnetron spraying system, a vacuum system, and a working gas bleeding-in system; at that, the magnetron spraying system includes at lest three magnetrons installed on levers providing alternating possibility of rotation of each magnetron in horizontal plane, which is equipped with an individual damper with an actuator; in addition, the working chamber includes a working table provided with possibility of being turned about its axis and heating a product; besides, the device includes a control device providing alternate change of position of each magnetron in horizontal plane so that scanning movement of magnetron to the centre of the working chamber and back is provided.

EFFECT: providing application of multi-layered coatings onto products with different dimensions; obtaining a uniform coating of high quality; reducing mass and dimensions parameters of the device, which makes it possible to use it as a module of a group of a cluster plant and possible controlled scanning movement of magnetrons above the product at variable speed.

4 cl, 2 dwg