APPLICATION METHOD OF THIN-FILM COATINGS, AND PROCESS LINE FOR ITS IMPLEMENTATION Russian patent published in 2014 - IPC C23C16/54 C23C14/56 

FIELD: metallurgy.

SUBSTANCE: substrates are located on rotating drums that are moved in series along treatment zones of a process line at an equal constant linear and angular speed. With that, the ratio of linear and angular speeds of the drum is chosen so that each point of the drum surface can perform at least two complete revolutions at passage of the treatment zone. The process line includes air-lock, buffer chambers and at least one technological chamber with a process device, holders of substrates and a conveying system. The holders are located on carriages installed with possibility of series passage through the chambers. Each holder of the substrates is made in the form of a rotating drum. The carriages have the possibility of being moved at a constant linear speed.

EFFECT: providing possibility of treatment both of flexible large-sized substrates and substrates of a small size with high uniformity degree of a coating.

10 cl, 4 dwg