FIELD: high-vacuum engineering. SUBSTANCE: pump has many porous sintered rings arranged in appropriate manner and made of nonevaporating getter material; they have first flat surface with central bore, second flat surface with wider central bore in parallel with first flat surface and spaced 1-10.5 mm from the latter (distance d), third intermediate flat surface placed between first and second surfaces and spaced 0.5-5.0 mm from first surface (distance t) and provided with bore coaxial with that of first surface; first surface of next ring is in contact with second surface of preceding ring and first surface of next ring is spaced from third surface of preceding ring through height c of 0.5-10 mm. EFFECT: improved capacity of getter pump. 10 cl, 3 dwg
Authors
Dates
1997-06-20—Published
1993-05-03—Filed