HIGH-CAPACITY GETTER PUMP Russian patent published in 1997 - IPC

Abstract RU 2082250 C1

FIELD: high-vacuum engineering. SUBSTANCE: pump has many porous sintered rings arranged in appropriate manner and made of nonevaporating getter material; they have first flat surface with central bore, second flat surface with wider central bore in parallel with first flat surface and spaced 1-10.5 mm from the latter (distance d), third intermediate flat surface placed between first and second surfaces and spaced 0.5-5.0 mm from first surface (distance t) and provided with bore coaxial with that of first surface; first surface of next ring is in contact with second surface of preceding ring and first surface of next ring is spaced from third surface of preceding ring through height c of 0.5-10 mm. EFFECT: improved capacity of getter pump. 10 cl, 3 dwg

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RU 2 082 250 C1

Authors

Bruno Ferrario[It]

Paolo Manini[It]

Dates

1997-06-20Published

1993-05-03Filed