GETTER PUMP WITH HIGH VELOCITY OF GAS SORPTION Russian patent published in 2002 - IPC

Abstract RU 2195579 C2

FIELD: vacuum devices. SUBSTANCE: pump has getter structures installed symmetrically around heating element. Number of getter structures is from three to eight. Hole is made in pump housing wall through which getter structures are connected with evacuation space. Base of pump is formed by solid flange. Getter disks are made of mixture of sintered powders, 60% by weight of alloy and 40% by weight of zirconium. EFFECT: improved performance of pump. 10 cl, 8 dwg

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RU 2 195 579 C2

Authors

Konte Andrea

Dates

2002-12-27—Published

1998-10-12—Filed