GETTER PUMP Russian patent published in 2003 - IPC

Abstract RU 2199027 C2

FIELD: pump construction. SUBSTANCE: pump has getter device. This device is disposed in annular peripheral area of cylindrical cartridge. The latter is coaxially mounted inside steel cylindrical housing or short post. Cylindrical housing and post are placed between working chamber and turbo- molecular pump. Getter device is heated by electric current directly fed to filamentary metal element. EFFECT: enhanced efficiency of pump operation. 7 cl, 5 dwg

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RU 2 199 027 C2

Authors

Dzhannantonio Roberto

Konte Andrea

Dates

2003-02-20—Published

1998-06-11—Filed