FIELD: cleaning of gas working atmosphere. SUBSTANCE: getter system to clean gas working atmosphere in process of physical precipitation from vapor phase is built up of one or more getters in the form of bodies sintered from powders of getter material or layers of getter material precipitated on metal substrate that should be placed in working zone of technological chambers for precipitation of thin layers of metal or ceramic materials from vapors or plasma to clean gas atmosphere. Getters are positioned in parallel to screens limiting working zone with formation of gap between them and screens that communicates with working zone. Surfaces of getters facing screens are made of getter material. EFFECT: effective cleaning of working atmosphere in the course of process of PVD. 23 cl, 7 dwg
