DEVICE FOR MANUFACTURE OF QUARTZ VIBRATORS Russian patent published in 1997 - IPC

FIELD: technology of manufacture of piezoelectric vibrators by coating crystal wafers with vacuum evaporation of metals with control and regulation of their deposition. SUBSTANCE: the offered device has vacuum chamber accommodating metal evaporator, two parallel gates connected with electromagnets, and casette attached to table for treated vibrators electrically connected with self-excited oscillator whose frequency meter through coding circuit is connected with control comparator. Output of comparator of drive of table positioning is connected with the second input of generator of pulse sequence installed between comparator and electromagnet of closing gate. The second gate has calibrated process hole. Self-excited oscillator controls the drive of table positioning, and comparators control electromagnets. Resistive evaporator is installed inside the casette axially to quarts vibratory operating position. EFFECT: increased accuracy of adjustment of quartz vibrator, reduced consumption of precious metals and higher productivity. 1 dwg