HEAT LOSS ANEMOMETER AND METHOD OF ITS MAKING Russian patent published in 2012 - IPC G01P5/12 G01F1/684 

FIELD: instrument making.

SUBSTANCE: heat loss anemometer is proposed in a microelectromechanical (MEMS) version. A heater and temperature sensors of the proposed heat loss anemometer are formed on a membrane, on the rear side of which there is a sealed cavity filled with a material, the heat conductivity coefficient of which makes less than 0.1 of the membrane material heat conductivity coefficient, or vacuumised. Also a method is proposed to make a heat loss anemometer. According to this method, heaters and temperature sensors are generated on the substrate surface. A membrane is formed from a substrate material by means of its rear side etching. A cavity formed in the rear side of the substrate is sealed in the medium of either argon or krypton, or after filling of the cavity with the solid material.

EFFECT: increased sensitivity, accuracy and measurement limits.

7 cl, 1 dwg