THERMAL MEMS ACCELEROMETER Russian patent published in 2025 - IPC G01P15/08 G01P15/00 

FIELD: measuring.

SUBSTANCE: invention relates to measurement equipment, namely to thermal accelerometers. Bridge structure with heating element, located on the front side of the first substrate above the through cavity, creates a thermal cloud when electric contacts of the heating element are connected to the source and current is passed through the heating element. Displacement of the heat cloud in the inner cavity of the thermal MEMS accelerometer at occurrence of linear accelerations is detected by temperature measurement elements above the through cavity on suspensions, which are located on the second and third substrates. Fourth substrate with a blind cavity serves to form a single inner cavity of the MEMS accelerometer when assembling the substrates by thermocompression bonding. Each group of thermoelements contains five or more thermoelements, one of which is located on the axis passing through the centre of symmetry of the heater perpendicular to the plane of its arrangement, and the others – in pairs along two mutually perpendicular axes symmetrically relative to the central element in the same plane with it.

EFFECT: enabling measurement of acceleration in a plane perpendicular to the substrate, taking into account the sign and high sensitivity of measurement along the axes in the plane of the substrate.

2 cl, 5 dwg