APPARATUS FOR APPLYING DIELECTRIC COATINGS ONTO INNER SURFACE OF HEMISPHERICALLY-SHAPED CARRIERS Russian patent published in 1997 - IPC

FIELD: application of coatings. SUBSTANCE: essence of invention is in that, to apply high-quality coatings onto several hemispheres by inexpensive way, a number of coating-application chambers are combined into single station which, through symmetrical system of gas ducts, is connected to gas generator and common vacuum pump. Gas duct cross-section areas and shapes, in dependence on distance to gas generator or vacuum pump, are the same. Owing to it, equal flux conditions are provided in all chambers. Gas duct systems may be formed by precision tubes or by agency of monolith boards, in which passages for gas are drilled or milled. A number of stations, in turn, may be combined into a block with symmetrical system of gas pipelines connected to common vacuum pump and common gas generator. EFFECT: reduced cost. 24 cl, 25 dwg