FIELD: plasma ignition equipment. SUBSTANCE: method involves ignition of plasma in outlet of reaction chamber by means of at least short-time heavy voltage pulse. Heavy voltage pulses or low-frequency high- amplitude voltage pulses which frequency is in range of 10-100 kHz are used for ignition. Heavy voltage is synchronized with microwave pulses. Another claim of invention describes method in which microwave pulses are increased for short time at least during their leading period. Periodic increase of microwave pulses is also possible. EFFECT: increased functional capabilities. 11 cl, 7 dwg
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