FIELD: plasmochemical coating. SUBSTANCE: dielectric and/or metallic layers are obtained on the surfaces of dome-shaped backing in a vacuum chamber by plasmochemical precipitation from the vapor-gas phase. The thickness of the gaseous reaction layer is regulated by means of a body of motion. The body of motion is made of a material, whose dimensions do not change at the precipitation temperature. The thickness of the gaseous reaction layer is within 2 to 20 mm. The device for production of coating uses a vacuum chamber, gas inlet and outlet ducts, at least one backing holder and a plasma generator. It has also at least one body of motion installed under the backing. The vacuum chamber may be formed by the dome-shaped backing connected to a reaction vessel. EFFECT: facilitated procedure. 11 cl, 6 dwg
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Authors
Dates
1995-07-25—Published
1991-03-15—Filed