FIELD: microelectronics. SUBSTANCE: method involves generation of hydrogen using gas direct current discharge of 1-3 A, glowing voltage is 50-100 V, hydrogen pressure in discharge is greater than 0.04 mm of mercury column. Generator has device which generates magnetic field for running gas discharge in discharge chamber. Hollow cathode enters into chamber of cylindrical anode in order to increase volume of generation region with dense plasma. This results in ignition of additional magnetron discharge between external surface of hollow cathode and inner surface of anode. EFFECT: increased efficiency, increased concentration of electrons in plasma of gas discharge. 3 dwg
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