FIELD: manufacture of semiconductor materials. SUBSTANCE: invention relates to equipment for manufacturing semiconductor materials and may be used when growing monocrystals on seed crystal. Installation contains growing chamber 1 with crucible 2, chamber being separated by partition 3 with central opening 4 into lower (5) and upper (6) compartments; seed holder 7, and cassette 8 with wells 10. Each well has detent in its upper part and support with detent in lower part. Support is fastened on sliding bar installed in slot 15 of a hollow shaft enclosing pusher. Cassette rotation and vertical displacement drives are also available. Such construction makes possible adjusting each well 10 of cassette 8 according to length of grown monocrystal and, in due time, simultaneously discharging cassette from chamber with different-length monocrystals in wells. EFFECT: facilitated procedure. 3 cl, 8 dwg
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Authors
Dates
1997-08-27—Published
1995-05-10—Filed