SILICON MONOCRYSTAL GROWING APPARATUS Russian patent published in 1996 - IPC

Abstract RU 2054496 C1

FIELD: obtaining of semiconductor monocrystals. SUBSTANCE: apparatus for growing silicon monocrystals from melt on seed has chamber, seed holder with seed, unit for separating monocrystals grown and monocrystal storage unit. Monocrystal separating unit has cam with projections, with the number of projections being equal to that of monocrystals to be grown, drive for rotating this unit and double-armed lever, whose one arm is provided with guiding member and thrust. Cam and lever axes are positioned in parallel with crystal growing axis for rotation adjacent to seed. One projection is engageable with lever arm and other projection and lever thrust are engageable with crystal neck portion. EFFECT: increased efficiency, simplified construction and enhanced reliability in operation. 6 dwg

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RU 2 054 496 C1

Authors

Kutsenogij L.K.

Petrov S.I.

Tupaev V.M.

Stepanov A.G.

Dates

1996-02-20Published

1992-07-01Filed