METHOD OF APPLICATION OF COATING IN VACUUM AND DEVICE REQUIRED FOR ITS REALIZATION Russian patent published in 1997 - IPC

FIELD: electrical engineering. SUBSTANCE: hollow article is placed in vacuum chamber, and vacuum arc is initiated between anode and cathode. It includes near-cathode section, transition zone and arc column with conductivity zone passing through arc center. After arc is initiated it is positioned inside article by moving the anode. Preliminarily space is provided between cathode and article end face proceeding from condition that arc column is arranged inside article, and transition zone is beyond the latter. Arc is additionally exposed to effect of homogeneous longitudinal magnetic field, and conductivity zone diameter is set not in excess of anode diameter. Use is made of device which has vacuum chamber, with anode and cathode arranged coaxially in it, as well as substrate holder. In addition device has enveloping vacuum chamber, magnetic system which creates homogeneous longitudinal magnetic field, detector of diameter of arc conductivity zone, test generator including oscillatory circuit, detector signal processing unit, and recording device. Detector is made as induction coil mounted coaxially with anode and cathode and included in oscillatory circuit of test generator which is connected to detector signal processing unit. The latter is connected to recording device. EFFECT: improved efficiency of process. 2 dwg, 1 tbl