INSTALLATION FOR DEPOSITION OF THE PROTECTING COATINGS Russian patent published in 2008 - IPC C23C14/40 

FIELD: aircraft industry; other industries; devices for deposition of the protecting coatings.

SUBSTANCE: the invention is pertaining to the installation for deposition of the protecting coatings and may be used for deposition of the protecting coatings on the articles of the aeronautical engineering. For improvement of the quality of the protecting coatings at the expense of elimination of their residual porosity and for expansion of the technological capabilities of the installation at conservation of the high repeatability of the parameters of the deposited coatings the ion accelerator (34) with the ionic-optical system (IOS) it is allocated through the core member (37) horizontally on the axis of the fitting pipe (35). The fitting pipe (35) is hermetically connected to the body of the vacuum chamber (1). The stationary shutter (36) is installed on the screen of the cathode (7) and is made in the form of the plate with the dimensions sufficient for reduction to null of the looking angle of the IOS of the accelerator by the cathode spots of the vacuum arc. The magnetic coil (4) is made in the form of two sections coaxially embracing the body of the vacuum chamber (1) above and below the fitting pipe (3). The cooled anode (3) is made in the form of the ring fixed on the cap(cover) (25) of the vacuum chambers (1) by means of the feeding the electric current and the cooling water pipe connections through the coaxial holes executed in the annular electrically insulated electrode (21) and in the cover (25) of the vacuum chamber. The anode (3) is disposed above the working area of the treatment of the coated articles. The gaseous system (30) contains the separate channels used for feeding of the working gas into the gas-discharge source, the ionic accelerator and in the vacuum chamber.

EFFECT: the invention ensures production of the improved quality protecting coatings with the high repeatability of their parameters, which may be deposited on the articles of the aeronautical engineering.

3 cl, 2 dwg