METHOD OF MICROOBJECT SURFACE EXAMINATION AND DEVICE INTENDED FOR ITS REALIZATION Russian patent published in 1997 - IPC

FIELD: electronic engineering; examination of surface layers of substance by microwave and scanning tunnel spectroscopy. SUBSTANCE: contact electric field is created in space between conducting needle and microobject surface, constant tunnel current is recorder, conducting needle is moved over microobject surface, and relief of the latter is determined. Microwave frequency voltage of one or several frequencies is applied additionally to space between needle and microobject surface. Then microwave frequency component of tunnel current is recorded. Control of conducting needle movement and determination of microobject surface relief are performed by values of constant tunnel current and microwave-frequency component of tunnel current. Device has substrate for microobject installation and conducting needle of tunnel microscope which can move over microobject surface and is connected to tunnel microscope control unit. Microwave resonator provided with input and output coupling loops is included in device. Conducting needle of tunnel microscope is part of resonator. Device has also series-connected generator, unidirectional member and low-pass filter the output of which is connected to input coupling loop. Use is made of spectrum analyzer the input of which is connected to retunable filter output. Spectrum analyzer output is connected to input of tunnel microscope control unit. Side surface of central electrode is made conical, parabolic or exponential. EFFECT: more efficient examination process. 2 cl, 1 dwg