SCANNING TUNNEL MICROSCOPE Russian patent published in 2012 - IPC H01J37/285 

FIELD: instrument making.

SUBSTANCE: in a scanning tunnel microscope comprising a spike, a detachable accurate piezodrive by axes X, Y, Z, a specimen holder with a pitch piezodrive of its approaching with the spike, a unit to measure a tunnel current, a unit to record topography of the surveyed surface with a controlling calculator, a unit to compensate for voltage pulsations, HV voltage amplifiers by X, Y, Z axes, a switchboard, a unit of adaptive control, a digital to analog converter of heat compensation, a low pass filter, a summator, a digital to analog converter of accurate control of a tunnel gap, and also two digital to analog control converters of X, Y-electrodes of an external piezotube of a detachable accurate piezodrive, the following components have been INTRODUCED: a unit of automatic detection and recognition of nanoparticles connected via a data bus with a unit to record topography of a surveyed surface, a control calculator and a unit of adaptive control, and also a system of active vibration protection, comprising a magnet, a magnetic conductor, a movable coil, an acceleration sensor, an elastic membrane, an amplifier of vibration protection signals, the inlet of which is connected with the acceleration sensor, and the outlet - with the inlet of the analog to digital converter, the outlet of which is connected to one of the inlets of a signal processor, the appropriate outlet of which via the digital to analog converter and amplifier is connected to a movable coil of the active vibration protection system.

EFFECT: expansion of functional capabilities due to automatic detection and recognition of STM-images of nanoobjects with higher reliability, provided by using of two recognition methods, and also by reduction of noise at STM-images and suspension of measurements for periods of time with higher vibroacoustic background.

2 dwg