METHOD OF PREPARING SILANE FOR SEMICONDUCTOR EQUIPMENT Russian patent published in 1997 - IPC

Abstract RU 2093463 C1

FIELD: semiconductor engineering. SUBSTANCE: calcium salicides are reacted with ammonium bromide, and reaction products are separated at low temperatures. EFFECT: more efficient preparation method.

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RU 2 093 463 C1

Authors

Karelin V.A.

Shpunt L.B.

Dates

1997-10-20—Published

1993-01-18—Filed