METHOD OF MANUFACTURING SILICON INGOTS IN THE FORM OF WIDE PLATES WITH VARIABLE THICKNESS Russian patent published in 1997 - IPC

Abstract RU 2095495 C1

FIELD: semiconductor materials. SUBSTANCE: wide silicon plates with variable thickness are manufactured without crucible and melt-replenishment means by way of stretching rectangular pattern from molten apex of polycrystalline charge and replenishing melt by feeding charge from below upward into melting zone. As heater, loop-type high-frequency inductor is used disposed near the charge apex. EFFECT: enhanced efficiency and improved quality of product. 2 dwg

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RU 2 095 495 C1

Authors

Dobrovenskij Vladimir Veniaminovich

Afanas'Ev Igor' Vladimirovich

Dates

1997-11-10Published

1995-08-22Filed