SENSOR DETERMINING CONCENTRATION OF GASES Russian patent published in 1997 - IPC

FIELD: measurement technology, determination of content of carbon monoxide in exhaust gases of internal combustion engines, of ethanol in ambient atmosphere, of ammonia in industrial buildings and of other gasses released during execution of technological processes. SUBSTANCE: sensor determining concentration of gases includes substrate, film heater, dielectric layer, gas sensitive element and electrodes for connection to voltage source. Heater and gas sensitive element are made from same metal oxide, preferably from SnO₂ with doping additions. Surface of gas sensitive element presents layer of alternating microirregularities with profile of saw-tooth shape, for example. Thickness of this layer is commensurable to size of grain of used metal oxide. EFFECT: enhanced accuracy and reliability of sensor. 2 cl, 2 dwg