DIFFERENTIAL SENSOR FOR GAS ANALYSER Russian patent published in 2010 - IPC G01N27/12 

FIELD: physics.

SUBSTANCE: differential sensor has a measurement and a reference arm made in form of a dielectric substrate, on one side of which there is a strip heater with contacts for connection to a power supply, and on the other - a gas-sensitive element with terminal leads for connection to a measurement unit. The gas-sensitive element in the measurement and reference arms is made from the same semiconductor material, wherein the value R of the ratio of concentration of acceptor centres with acidity constant value pK_a=3.3 to concentration of centres with acidity constant values in the range pK_a 6.4-6.8 in the material of the measurement arm differs by not less than 10-15 times from the similar value R in the material of the reference arm.

EFFECT: higher sensitivity of the sensor to different gases, higher accuracy of the obtained data, simple design and higher manufacturability of the sensor.

9 cl, 3 dwg