GAS CONCENTRATION SENSOR Russian patent published in 2007 - IPC G01N27/12 

FIELD: measuring engineering.

SUBSTANCE: sensor comprises two identical dielectric substrates. One side (3) of dielectric substrate (1) is provided with pin contacts (4) arranged in series and gas-sensitive layer (5) made of a film based on the stannic dioxide. The back side (6) of dielectric substrate (1) is provided with platinum heater (7) and gastight spacer (8). Side (9) of dielectric substrate (2) that faces gastight spacer (8) is provided with pin contacts (1) and gas sensitive layer (11) arranged in series. Opposite side (12) of dielectric substrate (2) has heat sensor (13). Gas spacer (14) is mounted in the vicinity of the heat sensor. Layer (5), contacts (4), substrate (1), and heater (7) define a gas sensitive member that is separated from the other gas sensitive member defined by layer (11), contacts (10), and substrate (2), and heat sensor (13) by spacer (8). The gas sensitive members are isolated from the ambient with gastight spacer (14).

EFFECT: enhanced stability.

3 dwg