DEVICE FOR PLATE ORIENTATION Russian patent published in 1997 - IPC

FIELD: manufacture of semiconductor devices, mechanical engineering. SUBSTANCE: device for plate orientation has inclined table with nozzles and side limiters that are tilted towards surface of table. Nozzles belong to three types. Nozzles of first two types are located on axes parallel to direction of transportation, some of these nozzles are perpendicular to surface of table and spaced evenly, the rest are inclined to surface of table and positioned unevenly. Nozzles of third type are placed along axis perpendicular to direction of transportation and are inclined to surface of table. One of them is inclined in opposition to inclination of others. Sensor of presence of plate is additionally mounted on table. EFFECT: enhanced functional accuracy and reliability of device. 3 dwg