METHOD OF APPLYING COATING UNDER VACUUM Russian patent published in 1998 - IPC

FIELD: coatings. SUBSTANCE: invention is designed for application in mechanical engineering when high adhesion strength of coatings on parts is needed and consists in depositing formed stream of particles of material to be deposited, while conferring oscillations with equal and opposite-sign frequencies and discrete pressure variations on target cathode and base. The latter is achieved by means of inert gas introduced into the chamber, its frequency being multiple to that of base oscillations. The base is additionally conferred by separate oscillations in mutually perpendicular directions. EFFECT: enhanced deposition efficiency. 4 dwg