APPARATUS FOR VACUUM DEPOSITION OF COATINGS Russian patent published in 1994 - IPC

Abstract RU 2023743 C1

FIELD: vacuum engineering; sphere of vacuum deposition of coatings. SUBSTANCE: this apparatus includes housing, rotary table with coaxially positioned backings, movable cathode and spart generator (ignition electrode). Cathode is built up of circular members and set in axial motion by eccentric. Backing deposition zone is limited by circular magnets. Rotatable backing is disposed at certain angle to allow uniform deposition. Number of spark generators located symmetrically relative to cathode is multiple of number of backings. EFFECT: more sophisticated design. 3 cl, 2 dwg

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RU 2 023 743 C1

Authors

Nagajtsev V.F.

Nagajtsev P.V.

Dates

1994-11-30Published

1991-06-14Filed