FIELD: vacuum engineering; sphere of vacuum deposition of coatings. SUBSTANCE: this apparatus includes housing, rotary table with coaxially positioned backings, movable cathode and spart generator (ignition electrode). Cathode is built up of circular members and set in axial motion by eccentric. Backing deposition zone is limited by circular magnets. Rotatable backing is disposed at certain angle to allow uniform deposition. Number of spark generators located symmetrically relative to cathode is multiple of number of backings. EFFECT: more sophisticated design. 3 cl, 2 dwg
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Authors
Dates
1994-11-30—Published
1991-06-14—Filed