METHOD FOR PRODUCTION OF DIAMOND-LIKE COATING Russian patent published in 1998 - IPC

FIELD: technique of production of diamond-like films; may be used for application of solid, wear-resistant chemically inert and amorphous diamond-like coating with thickness up to 59 mcm and high adhesion to articles. SUBSTANCE: prior to application of diamond-like coating, positive potential of 0.3-3 kV is applied to all three anode plates, and in this case, article is subjected to pickling with inert gas ions, then negative potential of 0.3-0.9 kV is applied to two extreme plates with central plate grounded, and adhesion underlayer is applied to article in inert gas medium and then positive potential of 0.3-3 kV is applied to all three plates of anode, and diamond-like coating is applied to article in medium of hydrogen. EFFECT: higher efficiency. 1 tbl