METHOD FOR PRODUCING AN AMORPHOUS NANOSTRUCTURED DIAMOND-LIKE COATING Russian patent published in 2021 - IPC C23C14/24 C23C14/02 C23C14/06 C01B32/26 B82B3/00 B82Y30/00 B82Y40/00 

FIELD: coatings.

SUBSTANCE: invention relates to the technology of applying hard wear-resistant nanostructured coatings from amorphous diamond-like carbon and can be used in metal working, mechanical engineering, medicine, electronics, solar power engineering, optoelectronics, photonics, in manufacture of liquid crystal displays, and other fields to increase the operational properties of the surface of products for various functional purposes. The method for producing an amorphous nanostructured diamond-like coating on a product includes conducting preliminary plasma cleaning of the surface of the product in a vacuum chamber by accelerated ions, applying an adhesive layer, and applying at least one layer of a diamond-like carbon film using cathode graphite sputtering, wherein, after one coating layer with a thickness of 1 to 3 mcm is applied, the product is removed from the chamber and subjected to polishing to a roughness R_a of 0.04 mcm and lower, and then returned to the chamber, subjected to reapplication of a coating to a thickness of 1 to 2 mcm, then polished again to the same value of R_a.

EFFECT: creation of a moisture-impermeable homogeneous dense structure on the surface of the diamond-like coating, wherein the corrosion resistance of the amorphous nanostructured diamond-like coating is thereby increased.

1 cl, 1 dwg, 1 ex